期刊信息
- 刊名： 河北师范大学学报（自然科学版）Journal of Hebei Normal University (Natural Science)
- 主办： 河北师范大学
- ISSN： 1000-5854
- CN： 13-1061/N
- 中国科技核心期刊
- 中国期刊方阵入选期刊
- 中国高校优秀科技期刊
- 华北优秀期刊
- 河北省优秀科技期刊
Study of Diamond Films Grown on Si(100) by Glow Plasma HFCVD
摘要/Abstract
摘要：
采用直流辉光等离子体助进热丝CVD的方法,低温(550～620℃)沉积得到晶态金刚石薄膜.经X射线衍射谱、扫描电子显微镜及Raman光谱分析表明:稍高气压有利于金刚石薄膜的快速、致密生长.
Abstract：
The diamond films are deposited at low temperature (550～620℃) using glow plasma HFCVD(hot filament chemical vapor deposition). The samples morphology and structure properties have been analyzed by scanning electron microscopy (SEM) and X-ray diffraction(XRD),and it is concluded that high pressure is the optimum condition for diamond films growth.