期刊信息

  • 刊名: 河北师范大学学报(自然科学版)Journal of Hebei Normal University (Natural Science)
  • 主办: 河北师范大学
  • ISSN: 1000-5854
  • CN: 13-1061/N
  • 中国科技核心期刊
  • 中国期刊方阵入选期刊
  • 中国高校优秀科技期刊
  • 华北优秀期刊
  • 河北省优秀科技期刊

ZnO的p型掺杂研究进展

  • 1. 河北师范大学 化学与材料科学学院, 河北 石家庄 050024;
    2. 河北交通职业技术学院 教务处, 河北 石家庄 050035;
    3. 劳伦斯伯克利国家实验室 先进光源, 加利福尼亚 伯克利 94720
  • DOI: 10.11826/j.issn.1000-5854.2014.05.018

摘要/Abstract

摘要:

ZnO是一种宽带隙Ⅱ~Ⅵ族半导体材料,由于其独特的性能,如高电子迁移率、广泛的激子结合能,是一种很有前途的光电器件材料;但因本征施主缺陷和施主杂质引起的自补偿效应等很难使其有效地实现n型向p型导电的转变。介绍了ZnO的p型掺杂机理、掺杂元素分类及国内外对p型ZnO研究的最新进展。

Abstract:

ZnO is a versatile Ⅱ~Ⅵ group semiconductor material with a wide bandgap.It is a promising material for opto-electronic device application due to its unique propertys,such as high electron mobility and large exciton binding energy.The transformation from the n-type to p-type is very difficult owing to the self-compensation effect resulted from the native donor defects and impurity.This review summarized the doping mechanism of p-type ZnO,the latest developments of p-type doped ZnO,and the classification of doping element.

参考文献 30

  • [1] FAN J C,SREEKANTH K M,XIE Z,et al.p-type ZnO Materials:Theory Growth Properties and Devices [J].Pro Mater Sci,2013,58:874-985.
  • [2] THOMAS M A,CUI J B.Electrochemical Route to p-type Doping of ZnO Nanowires [J].Phys Chem Lett,2010,1:1090-1094.
  • [3] KOBAYASHI A,SANKEY O F,DOW J D.Deep Energy Levels of Defects in the Wurtzite Semiconductors AlN,CdS,CdSe,ZnS,ZnO [J].Phys Rev B,1983,28(2):946-956.
  • [4] ROBERT F.Will UV Lasers Beat the Blues [J].Science,1997,276(5314):895-899.
  • [5] TUOMISTO F,RANKI V,SAARINEN K,et al.Evidence of the Zn Vacancy Acting as the Dominant Acceptor in n-type ZnO [J].Phys Rev Lett,2003,91:205502.
  • [6] OH M S,KIM S H,SEONG T Y.Growth of Nominally Undoped p-type ZnO on Si by Pulsed-laser Deposition [J].Appl Phys Lett,2005,87:122103(1-3).
  • [7] NAGATA T,SHIMURA T,NAKANO Y,et al Ferroelectricity in Li-doped ZnO∶X Thin Films and Their Application in Optical Switching Devices [J].Appl Phys,2001,40(1):5615-5617.
  • [8] WARDLE M G,GOSS J P,BRIDDON P R.Theory of Li in ZnO:A Limitation for Li-based p-type Doping [J].Phys Rev B,2005,71:155205.
  • [9] LIN S,HE H,LU Y,et al.Mechanism of Na-doped p-type ZnO Films:Suppressing Na Interstitials by Codoping with H and Na of Appropriate Concentrations [J].J Appl Phys,2009,106:093508.
  • [10] GUPTA M K,SINHA N,SINGH B K,et al.Synthesis of K-doped p-type ZnO Nanorods Along (100) for Ferroelectric and Dielectric Applications [J].Mater Lett,2010,64(16):1825-1828.
  • [11] DUAN L,GAO Wei,CHEN Ruiquan,et al.Influence of Post-annealing Conditions on Properties of ZnO ∶Ag Films [J].Solid State Commun,2008,145:479-481.
  • [12] YAN Y F,WEI S-H.Doping Asymmetry in Wide-bandgap Semiconductors:Origins and Solutions [J].Phys Stat Sol (b),2008,245:641-652.
  • [13] KANG H S,AHN D,KIM J H,et al.Structural,Electrical,and Optical Properties of p-type ZnO Thin Films with Ag Dopant [J].Appl Phys Lett,2006,88:202108.
  • [14] YAN F,ZHANG S B,PANTELIDES S T.Control of Doping by Impurity Chemical Potentials:Predictions for p-type ZnO [J].Phys Rev Lett,2001,86(25):5723-5726.
  • [15] ASHRAFI A B M A,SUEMUNE I,KUMANO H,et al.Nitrogen-doped p-type ZnO Layers Prepared with H2O Vapor-assisted Metalorganic Molecular-beam Epitaxy [J].Appl Phys,2002,41:1281-1284.
  • [16] MINEGISHI K,KOIWAI Y,KIKUCHI Y,et al.Growth of p-type Zinc Oxide Films by Chemical Vapor Deposition [J].Appl Phys,1997,36:1453-1455.
  • [17] YE Z-Z,LU J-G,CHEN H-H,et al.Preparation and Characteristics of p-type ZnO Films by DC Reactive Magnetron Sputtering [J].Cryst Growth,2003,253(1-4):258-264.
  • [18] FANG X,LI J H,ZHAO D X,et al.Phosphorus-doped p-type ZnO Nanorods and ZnO Nanorod p-n Homojunction LED Fabricated by Hydrothermal Method [J].J Phys Chem C,2009,113(50):21208-21212.
  • [19] LEE W J,KANG J G,CHANG K J.Properties of Nitrogen-implanted p-type ZnO Films Grown on Si3N4/Si by Radio-frequency Magnetron Sputtering [J].Appl Phys Lett,2004,84:5040-5042.
  • [20] KIM Y Y,HAN W S,CHO S K.Determination of Electrical Types in the p-doped ZnO Thin Films by the Control of Ambient Gas Flow [J].Appl Surf Sci,2010,256:4438-4441.
  • [21] KANG H S,KIM G H,KIM D L,et al.Investigation on the p-type Formation Mechanism of Arsenic Doped p-type ZnO Thin Film [J].Appl Phys Lett,2006,89:181103.
  • [22] RYU Y R,ZHU S,LOOK D C,et al.Synthesis of p-type ZnO Films [J].Crystal Growth,2000,216(1-4):330-334.
  • [23] YAMAMOTO T,YOSHIDA H K.Solution Using a Codoping Method to Unipolarity for the Fabrication of p-type ZnO [J].Appl Phys,1999,38:166-169.
  • [24] ZHANG X D,FAN H B,SUN J,et al.Effect of Substrates on the Properties of p-type ZnO Films [J].Physica E,2007,39:267-270.
  • [25] ZHANG C Y,LI X M,BIAN J M,et al.Structural and Electrical Properties of Nitrogen and Aluminum Codoped p-type ZnO Films [J].Solid State Commun,2004,132:75-78.
  • [26] JOSEPH M,TABA TA H,KAWAI T.p-type Electrical Eonduction in ZnO Thin Films by Ga and N Codoping [J].J Appl Phys,1999,38(11A):L1205-L1217.
  • [27] SINGH A V,MEHRA R M,WAKAHARA A,et al.Doping Mechanism in Aluminum Doped Zinc Oxide Films [J].Appl Phys,2004,95(7):3640-3643.
  • [28] YAN Z,SONG Z T,LIU W L,et al.Optical and Electrical Properties of p-type Zinc Oxide Thin Films Synthesized by Ion Beam Assisted Deposition [J].Thin Solid Films,2005,492:203-206.
  • [29] BIAN J M,LI X M,GAO X D,et al.Deposition and Electrical Properties of In-N Codoped p-type ZnO Films by Ultrasonic Spray Pyrolysis [J].Appl Phys Lett,2004,84(4):541-543.
  • [30] SANMYO M,KOBAYASHI K,TOMITA Y.Enhancement of N Concentration in ZnO Codoped with Be and N Atoms [J].Chem Mater,2002,9:944-945.